Recycling of SiC in Crystalline Silicon Cutting Fluid

Recycling of SiC in Crystalline Silicon Cutting Fluid

Zhu, Jing Jing, Huang, Qun Qun, Yang, Shui Qing, Luo, Wei, Lin, Jun
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Volume:
622-623
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.622-623.504
Date:
December, 2012
File:
PDF, 236 KB
english, 2012
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