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Thermal Characteristics Analysis of Aerostatic Direct Drive Rotary Stage
Zhang, Cong Peng, Li, Mei Bo, Luo, Xue KeVolume:
655-657
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.655-657.287
Date:
January, 2013
File:
PDF, 421 KB
english, 2013