Comparison of DLC and N-Doped DLC Synthesized by RF-PECVD

Comparison of DLC and N-Doped DLC Synthesized by RF-PECVD

Janchocktawee, Witit, Rachpech, Vishnu, Wannasin, Jessada
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Volume:
893
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.893.528
Date:
February, 2014
File:
PDF, 415 KB
english, 2014
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