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Segregation-Controlled Gold Diffusion in Polycrystalline Silicon
Poisson, C., Stolwijk, Nicolaas, Bernardini, JeanVolume:
143-147
Year:
1997
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.143-147.1457
File:
PDF, 462 KB
1997