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Plasma Polymerization of Hexamethyldisiloxane and Tetraethoxysilane Thin Films for Humidity Sensing Application
Guermat, N., Bellel, A., Sahli, Salah, Segui, Yvan, Raynaud, PatriceVolume:
354
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.354.41
Date:
June, 2014
File:
PDF, 470 KB
english, 2014