Composition and Morphology Control of Si-C-N Powders by CVD Method
Kavecký, Štefan, Janeková, B., Šajgalík, PavolVolume:
175-176
Year:
2000
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.175-176.49
File:
PDF, 558 KB
2000