Ultra Precision Polishing with Oscillation Speed Control:...

Key Engineering Materials 2003 Vol. 238-239

Ultra Precision Polishing with Oscillation Speed Control: an Analysis of the Pressure Distribution and Profile

Yoshitomi, Kenichiro, Une, Atsunobu, Mochida, Masaaki
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Volume:
238-239
Year:
2003
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.238-239.219
File:
PDF, 168 KB
english, 2003
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