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Chemical Solution Deposition of PZT/Oxide Electrode Thin Film Capacitors with Preferred Orientation on Si Substrate
Suzuki, Hisao, Miwa, Yuki, Ohno, Tomoya, Fujimoto, MasayukiVolume:
301
Year:
2006
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.301.269
File:
PDF, 753 KB
english, 2006