Investigation on Micro-Machining Characteristics and...

Key Engineering Materials 2012 / 6 Vol. 516

Investigation on Micro-Machining Characteristics and Phenomenon of Semiconductor Materials by Harmonics of Nd:YAG Laser

Hirano, Takayuki, Okamoto, Yasuhiro, Okada, Akira, Uno, Yoshiyuki, Sakagawa, Tomokazu, Nakashiba, Shinichi
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Volume:
516
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.516.36
Date:
June, 2012
File:
PDF, 2.63 MB
english, 2012
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