Structural Development in Hard Si-Based TiN Coatings as a...

Materials Science Forum 2002 Vol. 383

Structural Development in Hard Si-Based TiN Coatings as a Function of Temperature: A Comprehensive Study in Vacuum and in Air

Vaz, F., Rebouta, L., Carvalho, S., Rocha, L.A., Soares, Delfim, Alves, Eduardo
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Volume:
383
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.383.151
File:
PDF, 546 KB
2002
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