Improved Resolution of Epitaxial Thin Film Doping Using...

Materials Science Forum 2005 Vol. 483-485

Improved Resolution of Epitaxial Thin Film Doping Using FTIR Reflectance Spectroscopy

Mazzola, Michael S., Sunkari, Swapna G., Mazzola, Janice, Das, Hrishikesh, Melnychuck, Galyna, Koshka, Yaroslav, Wyatt, Jeffery L., Zhang, Jie
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Volume:
483-485
Year:
2005
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.483-485.397
File:
PDF, 315 KB
english, 2005
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