Deposition and Characterization of Aluminium Nitride (AlN) and Diamond Like Carbon (DLC) Hard Coatings
Mednikarov, B.Volume:
159
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.159.63
Date:
January, 2010
File:
PDF, 1.87 MB
english, 2010