Investigation of Trapped Charges-Induced Stain Formation on...

Solid State Phenomena 2012 / 2 Vol. 185

Investigation of Trapped Charges-Induced Stain Formation on RF-PECVD Diamond-Like Carbon Films

Seekumbor, Eakkaphon, Jaroenapibal, Papot, Lertwikool, Nuansamorn, Yamwong, Wittawat, Triroj, Napat
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Volume:
185
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.185.28
Date:
February, 2012
File:
PDF, 309 KB
english, 2012
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