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Investigation of Trapped Charges-Induced Stain Formation on RF-PECVD Diamond-Like Carbon Films
Seekumbor, Eakkaphon, Jaroenapibal, Papot, Lertwikool, Nuansamorn, Yamwong, Wittawat, Triroj, NapatVolume:
185
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.185.28
Date:
February, 2012
File:
PDF, 309 KB
english, 2012