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Sputtered ferroelectric thin films for dynamic random access memory applications
Lee, Jack, Chikarmane, Vinay, Sudhama, Chandra, Kim, JiyoungVolume:
3
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589308216705
Date:
June, 1993
File:
PDF, 383 KB
english, 1993