Thermally actuated, bistable, oxide/silicon/metal membranes

Thermally actuated, bistable, oxide/silicon/metal membranes

Arya, R, Rashid, M M, Howard, D, Collins, S D, Smith, R L
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/1/006
Date:
January, 2006
File:
PDF, 284 KB
english, 2006
Conversion to is in progress
Conversion to is failed