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Thermally actuated, bistable, oxide/silicon/metal membranes
Arya, R, Rashid, M M, Howard, D, Collins, S D, Smith, R LVolume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/1/006
Date:
January, 2006
File:
PDF, 284 KB
english, 2006