SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels,...

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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 16 April 2012)] Micro-Optics 2012 - Design and fabrication of microwindmill for fluidic media based on SU-8 for using flow-meter

Sabri Alirezaei, I., Ghaderi, M., Khalafi, M., Latifi, H., Thienpont, Hugo, Mohr, Jürgen, Zappe, Hans, Nakajima, Hirochika
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Volume:
8428
Year:
2012
Language:
english
DOI:
10.1117/12.922044
File:
PDF, 1.42 MB
english, 2012
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