Electrical Properties for Capacitors of Dynamic Random...

Japanese Journal of Applied Physics 1994 / 9 Vol. 33; Iss. Part 1, No

Electrical Properties for Capacitors of Dynamic Random Access Memory on ( P b , L a )( Z r , T i ) O 3 Thin Films by Metalorganic Chemical Vapor Deposition

Nakasima, Hiroshi, Hazumi, Sigeki, Kamiya, Tadashi, Tominaga, Kouji, Okada, Masaru
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.5139
Date:
September, 1994
File:
PDF, 571 KB
1994
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