The Evaluation of Hexafluorobenzene as an Environmentally...

Journal of The Electrochemical Society 2001 Vol. 148; Iss. 12

The Evaluation of Hexafluorobenzene as an Environmentally Benign Dielectric Etch Chemistry

Chatterjee, Ritwik, Karecki, Simon, Reif, Rafael, Sparks, Terry, Vartanian, Victor, Goolsby, Brian
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Volume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1415550
File:
PDF, 491 KB
english, 2001
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