[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Structural and Chemical Investigation of Annealed Al2O3 Films for Interpoly Dielectric Application in Flash Memories
Alessandri, Mauro, Piagge, Rossella, Caniatti, Massimo, Del Vitto, Annalisa, Wiemer, Claudia, Pavia, Giuseppe, Alberici, Stefano, Bellandi, Enrico, Nale, AngeloclaudioVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2355710
File:
PDF, 1.16 MB
english, 2006