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Accurate SIMS Doping Profiling of Aluminum-Doped Solid-Phase Epitaxy Silicon Islands
Civale, Yann, Nanver, Lis K., Alberici, Stefano G., Gammon, Andrew, Kelly, IanVolume:
11
Year:
2008
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2836739
File:
PDF, 249 KB
english, 2008