Structures, morphologies, and chemical states of sputter-deposited CrZrN thin films with various Zr contents
Chantharangsi, C., Denchitcharoen, S., Chaiyakun, S., Limsuwan, P.Volume:
589
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.06.045
Date:
August, 2015
File:
PDF, 1.54 MB
english, 2015