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SPIE Proceedings [SPIE Microelectronic Manufacturing '99 - Santa Clara, CA (Wednesday 22 September 1999)] In-Line Methods and Monitors for Process and Yield Improvement - COCOS oxide film characterization and monitoring
Hoff, Andrew M., DeBusk, Damon K., Schanzer, Robert W., Ajuria, Sergio A., Jakubczak, Jerome F.Volume:
3884
Year:
1999
Language:
english
DOI:
10.1117/12.361336
File:
PDF, 432 KB
english, 1999