Messstrategien für die zerstörungsfreie Schichtmessung...

Messstrategien für die zerstörungsfreie Schichtmessung mittels Ultraschallmikroskopie Strategies for the Non-Destructive Characterization of Thin Layers with Scanning Acoustic Microscopy

Schmitt, Robert, Dietrich, Björn, Hafner, Philip, Engelmann, Bastian
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Volume:
75
Language:
german
Journal:
tm - Technisches Messen
DOI:
10.1524/teme.2008.0838
Date:
January, 2008
File:
PDF, 593 KB
german, 2008
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