Electrostatic Excitation for the Force Amplification of...

Electrostatic Excitation for the Force Amplification of Microcantilever Sensors

Shokuhfar, Ali, Heydari, Payam, Ebrahimi-Nejad, Salman
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Volume:
11
Language:
english
Journal:
Sensors
DOI:
10.3390/s111110129
Date:
October, 2011
File:
PDF, 425 KB
english, 2011
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