Main Effects Study on Plasma Etched Aluminium Metallization

Applied Mechanics and Materials 2014 / 1 Vol. 487

Main Effects Study on Plasma Etched Aluminium Metallization

Sauli, Zaliman, Retnasamy, Vithyacharan, Yeow, Aaron Koay Terr
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Volume:
487
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/amm.487.195
Date:
January, 2014
File:
PDF, 242 KB
english, 2014
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