Comparison of Bond Strength of Silicon-Silica and...

Advanced Materials Research 2014 / 12 Vol. 1082

Comparison of Bond Strength of Silicon-Silica and Silicon-Pyrex in Wafer Bonding

Aziz, Muhammad Hafiz Ab, Sauli, Zaliman, Retnasamy, Vithyacharan, Kamarudin, Hussin, Wan Norhaimi, Wan Mokhdzani, Palianysamy, Moganraj
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Volume:
1082
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.1082.416
Date:
December, 2014
File:
PDF, 282 KB
english, 2014
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