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Modeling and Active Control of Circular Electrostatic Torsional Micromirror
Bai, Cheng, Huang, JinVolume:
629
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.629.649
Date:
December, 2012
File:
PDF, 309 KB
english, 2012