Reactive Ion Etching Parameter Effect on Aluminum Bond Pad...

Advanced Materials Research 2014 / 4 Vol. 925

Reactive Ion Etching Parameter Effect on Aluminum Bond Pad Surface Morphology

Palianysamy, Moganraj, Sauli, Zaliman, Hashim, Uda, Retnasamy, Vithyacharan, Taniselass, Steven, Ayub, Ramzan Mat
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Volume:
925
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.925.84
Date:
April, 2014
File:
PDF, 389 KB
english, 2014
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