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Structure and Optical Properties of Magnetron-Sputtered SiOx Layers with Silicon Nanoparticles
Khomenkova, L., Korsunska, N., Stara, T., Goldstein, Y., Jedrzejewski, J., Savir, E., Sada, C., Emirov, Y.Volume:
303-304
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/ddf.303-304.7
Date:
July, 2010
File:
PDF, 649 KB
english, 2010