Crystallisation and Tetragonal-Monoclinic Transformation in...

Key Engineering Materials 2002 Vol. 206-213

Crystallisation and Tetragonal-Monoclinic Transformation in ZrO2 and HfO2 Dielectric Thin Films

Zhao, Chao, Roebben, Gert, Heyns, Marc M., Van der Biest, Omer
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Volume:
206-213
Year:
2002
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.206-213.1285
File:
PDF, 310 KB
2002
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