Influence of Ar+ Energy of Bombardment Cu Target and Low Energy Assisted Bombardment on Cu-W Thin Film Structure by Ion Beam Sputtering
Ai, Yong Ping, Zeng, Ying Ying, Liu, Li Jun, Huang, Xiao Ming, Zhou, Tai PingVolume:
474-476
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.474-476.448
Date:
April, 2011
File:
PDF, 821 KB
english, 2011