Cr-N Strain-Gauge-Type Precision Displacement Sensor for...

Key Engineering Materials 2012 / 11 Vol. 523-524

Cr-N Strain-Gauge-Type Precision Displacement Sensor for Measuring Positions of Micro Stage

Azuma, Toyohiro, Niwa, Eiji, Peng, Yu Xin, Kaneko, Junji, Shimizu, Yuki, Ito, So, Gao, Wei
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Volume:
523-524
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.523-524.939
Date:
November, 2012
File:
PDF, 957 KB
english, 2012
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