Effects of C/Si Ratio on the Structure of β-SiC Film by...

Key Engineering Materials 2014 / 6 Vol. 616

Effects of C/Si Ratio on the Structure of β-SiC Film by Halide CVD

Han, Ming Xu, Zhou, Wei, Zheng, Ding Heng, Tu, Rong, Zhang, Song, Goto, Takashi
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Volume:
616
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.616.227
Date:
June, 2014
File:
PDF, 606 KB
english, 2014
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