Characterization of Homoepitaxial 4H-SiC Layer Grown from Silane/Propane System
Sartel, C., Bluet, Jean Marie, Soulière, Veronique, El Harrouni, I., Monteil, Yves, Mermoux, Michel, Guillot, GérardVolume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.433-436.165
File:
PDF, 417 KB
english, 2003