Control of the Surface Morphology on Low Off Angled 4H-SiC Homoepitaxal Growth
Kojima, Kazutoshi, Okumura, Hajime, Arai, KazuoVolume:
615-617
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.615-617.113
File:
PDF, 362 KB
english, 2009