Rapid Imaging of Carrier Density of Si Using Reflectance...

Materials Science Forum 2012 / 7 Vol. 725

Rapid Imaging of Carrier Density of Si Using Reflectance Measurement in the Terahertz Region

Hamano, Akihide, Takatsu, Yoshinobu, Ohno, Seigo, Minamide, Hiroaki, Ito, Hiromasa, Usuki, Yoshiyuki
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Volume:
725
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.725.227
Date:
July, 2012
File:
PDF, 344 KB
english, 2012
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