Yield Impact of Backside Metal-Ion Contamination

Solid State Phenomena 2012 / 4 Vol. 187

Yield Impact of Backside Metal-Ion Contamination

Carey, Stephen, Knotter, D. Martin, Ooms, Eric, Boersma, Johannes, van der Sar, Elfried, Cop, Robbert, Gerritzen, Wim, van Zadelhoff, Hans, Bouma, Henk
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Volume:
187
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.187.287
Date:
April, 2012
File:
PDF, 867 KB
english, 2012
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