Effect of the RF sputtering power on microstructural,...

Thin Solid Films 2015 / 08 Vol. 589

Effect of the RF sputtering power on microstructural, optical and electrical properties of Al doped ZnO thin films

Spadoni, A., Addonizio, M.L.
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Volume:
589
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.06.035
Date:
August, 2015
File:
PDF, 1.54 MB
english, 2015
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