Collisional atomic mixing: A study of marker broadening and SIMS depth profiling by TRIM-DYNAMIC
Biersack, Jochen P.Volume:
146
Language:
english
Journal:
Radiation Effects and Defects in Solids
DOI:
10.1080/10420159808220278
Date:
October, 1998
File:
PDF, 685 KB
english, 1998