Thickness Scaling of Pb(Zr,Ti)O 3 Thin Films and Pt...

Integrated Ferroelectrics 2002 / 01 Vol. 48; Iss. 1

Thickness Scaling of Pb(Zr,Ti)O 3 Thin Films and Pt Electrodes for High Density FeRAM Devices

Kim, Seung-Hyun, Koo, C. Y., Ha, S-M., Woo, H-J., Park, D-Y., Lim, J. E., Hwang, C. S., Ha, J.
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Volume:
48
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/713718318
Date:
January, 2002
File:
PDF, 467 KB
english, 2002
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