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Low temperature Ti-Si-C thin film deposition by ion beam assisted methods
Twardowska, Agnieszka, Rajchel, Boguslaw, Jaworska, LucynaVolume:
15
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/15/1/012040
Date:
November, 2010
File:
PDF, 729 KB
english, 2010