SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Nanotechnology VII - Atomic layer deposition of Al 2 O 3 on NF 3 -pre-treated graphene
Tiginyanu, Ion M., Junige, Marcel, Oddoy, Tim, Yakimova, Rositsa, Darakchieva, Vanya, Wenger, Christian, Lupina, Grzegorz, Kitzmann, Julia, Albert, Matthias, Bartha, Johann W.Volume:
9519
Year:
2015
Language:
english
DOI:
10.1117/12.2181242
File:
PDF, 1.49 MB
english, 2015