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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Fabrication of precision microholes and structures with smooth surfaces by a high repetition rate femtosecond laser
Nakaya, Takayuki, Shibata, Daisuke, Takeda, Hidetoshi, Toshima, Hiroaki, Kotaki, Toshiro, Sunakawa, Kazuhiko, Yaguchi, Yoichi, Miyamoto, Isamu, Helvajian, Henry, Itoh, Kazuyoshi, Kobayashi, Kojiro F.,Year:
2012
Language:
english
DOI:
10.1117/12.596597
File:
PDF, 367 KB
english, 2012