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Characterization and Application of Materials Grown by Electron-Beam-Induced Deposition
Koops, Hans W. P., Kretz, Johannes, Rudolph, Michael, Weber, Markus, Dahm, Gerold, Lee, Kam L.Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.7099
Date:
December, 1994
File:
PDF, 2.81 MB
1994