Effect of Gate Electrode Structure on Gate Oxide Integrity
Ryu, Hyuk-Hyun, Cha, Han-Seob, Lee, Jeong-GunVolume:
6
Year:
2003
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1523738
File:
PDF, 233 KB
english, 2003