Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under...

Journal of The Electrochemical Society 2008 Vol. 155; Iss. 8

Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient

Caubet, Pierre, Blomberg, Tom, Benaboud, Rym, Wyon, Christophe, Blanquet, Elisabeth, Gonchond, Jean-Pierre, Juhel, Marc, Bouvet, Philippe, Gros-Jean, Mickaël, Michailos, Jean, Richard, Claire, Itepra
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Volume:
155
Year:
2008
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2940306
File:
PDF, 922 KB
english, 2008
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