ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Ultra Low-k Materials: Challenges of Scaling
Zhao, Larry, Baklanov, Mikhail, Pantouvaki, Marianna, Tőkei, Zsolt, Beyer, GeraldYear:
2010
Language:
english
DOI:
10.1149/1.3501038
File:
PDF, 551 KB
english, 2010