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Influence of Substrate Bias Voltage on Properties of Medium-Frequency Magnetron Sputtering WS2 Soft Coatings
Lian, Yun Song, Deng, Jian Xin, Li, Shi Peng, Yan, Guang Yuan, Cheng, Hong WeiVolume:
229-231
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.229-231.2427
Date:
November, 2012
File:
PDF, 2.74 MB
english, 2012