Structural Optimization of MEMS-Based Hydrophones with...

Applied Mechanics and Materials 2013 / 2 Vol. 300-301

Structural Optimization of MEMS-Based Hydrophones with Perforated Active Membrane

Chang, Shun Hsyung, Zhilyaev, Igor, Shevtsova, Maria, Wu, Ping Chen, Cheng, Yuang Tung, Wu, Jiing Kae
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Volume:
300-301
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.300-301.597
Date:
February, 2013
File:
PDF, 553 KB
english, 2013
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