Position Estimation in Singly-Fed Electrostatic Actuation...

Applied Mechanics and Materials 2014 / 3 Vol. 541-542

Position Estimation in Singly-Fed Electrostatic Actuation Systems by Superposing Sensing Signals

Yamamoto, Akio, Suzuki, Junro
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Volume:
541-542
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.541-542.1487
Date:
March, 2014
File:
PDF, 829 KB
english, 2014
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